Firing system successfully completes marathon test

BTU International announces that its TRITAN HV90 dual-lane metallization firing system has successfully completed a marathon test, producing in excess of 60 million cells.

?Customers want to switch to dual-lane metallization processing to achieve in excess of 35 percent higher capital efficiency and up to 30 percent lower cost of ownership compared to single-lane processing,? said Bob Bouchard, product marketing manager for metallization products at BTU. ?With this test completed, the HV90 has proven it can reliably deliver those benefits.?

The TRITAN HV90 dual-lane metallization firing system features increased throughput at 3600 wafers per hour, an edge belt, volatile organic compound (VOC) abatement and a single zone spike with less than 3 seconds spike time. The TRITAN metallization firing system features BTU?s unique TriSpeed? technology, allowing users to take advantage of superior ramp rates ? up to 200ÂșC per second ? while not compromising the drying and cooling sections of the profile. The three-belt, three-speed system provides revolutionary control of profile development. In trials, TRITAN has consistently shown an improvement in fill factor, resulting in increased efficiency.
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Posted by Gloria Llopis | 2011-12-12